(RTTNews) – Dutch semiconductor equipment maker ASML Holding NV (ASML) provided an update on the fire at part of its plant in Berlin, Germany on January 3 on Friday. Over the past few days, ASML has carried out a preliminary assessment.
The company said the fire occurred in part of a production building at the Berlin site and the smoke partially affected an adjacent building. They have already been able to resume production in parts of these buildings. The other buildings on the site were not affected and are fully operational.
The company added that an assessment of the impact of the damage is ongoing.
The company said its metrology and inspection production plans are not affected because they do not contain any components made in Berlin. The production of DUV components has been relaunched.
As for EUV, the fire affected part of the production area of the wafer gripper, a module of EUV systems. They are still in the process of completing the recovery plan for this production area and determining how to minimize any potential impact to EUV customers, both in the exit plan and in field service.
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